On the Ohmic-dominant heating mode of capacitively coupled plasma inverted by boundary electron emission

Electron emission from the boundary is ubiquitous in a capacitively coupled plasma (CCP) and precipitates nonnegligible influence on discharge properties. Here, we present Particle-in-Cell/Monte Carlo Collision simulation of an Ohmic-dominant heating mode plasma, where stochastic vanishes only Ohmic sustains due to sheath inversion by electron emission. The inverted CCP features negative potential without Bohm presheath, hence excluding edge oscillation. particle energy transport proposed analyzed. flux, source voltage, neutral pressure transition between classic modes shown with designated scans. A modified inverse sheath–plasma coupling excessive ionization discovered. In end, key indicators diagnostics are provided for future experimental verifications.